Inventor

SHIM JAE-BAK

KR2 patents

Patents

2 patents

US11545340B2Jan 3, 2023

Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same

SEMES CO LTD4 citations69

US11322336B2May 3, 2022

Apparatus and method for treating substrate

SEMES CO LTD0 citations37