Inventor

YOGO TOSHIYA

JP4 patents

⚠️ This page may combine multiple inventors who share the name “YOGO TOSHIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

2 patents

US6192318B1Feb 20, 2001

Apparatus and method for automatically matching microwave impedance

FUJITSU LTD18 citations91

US5939953AAug 17, 1999

E-H matching device and apparatus and method for automatically matching microwave impedance

FUJITSU LTD12 citations72

UEDA MASAHISA

1 patent

US9059105B2Jun 16, 2015

Ashing apparatus

UEDA MASAHISA2 citations56

ULVAC INC

1 patent

US9466475B2Oct 11, 2016

Ashing device

ULVAC INC0 citations34