Inventor
LIM TAE-HYUNG
KR2 patents
Patents
2 patentsUS5885404AMar 23, 1999
Pedestal with self retaining sealing ring for semiconductor device etching system
SAMSUNG ELECTRONICS CO LTD237 citations96
US6041733AMar 28, 2000
Plasma processing apparatus protected from discharges in association with secondary potentials
SAMSUNG ELECTRONICS CO LTD32 citations88