P

Inventor

WANG XU JIN

JP5 patents
⚠️ This page may combine multiple inventors who share the name “WANG XU JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CO LTD

3 patents
US6273803B1Aug 14, 2001

Carriers and polishing apparatus

SPEEDFAM CO LTD57 citations95
US6012964AJan 11, 2000

Carrier and CMP apparatus

SPEEDFAM CO LTD73 citations93
US6210260B1Apr 3, 2001

Carrier and CMP apparatus

SPEEDFAM CO LTD19 citations83

(unassigned)

2 patents
US6089966AJul 18, 2000

Surface polishing pad

68 citations94
US6159082ADec 12, 2000

Slurry circulation type surface polishing machine

38 citations91