Inventor
WELLS AMYE L
US3 patents
Patents
3 patentsUS6888223B2May 3, 2005
Use of photoresist in substrate vias during backside grind
IBM14 citations81
US7074715B2Jul 11, 2006
Use of photoresist in substrate vias during backside grind
IBM5 citations60
US6455434B1Sep 24, 2002
Prevention of slurry build-up within wafer topography during polishing
IBM2 citations55