Inventor

STRIEBEL CHRISTOPH

DE4 patents

⚠️ This page may combine multiple inventors who share the name “STRIEBEL CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON THERMAL PRODUCTS

1 patent

US7056389B2Jun 6, 2006

Method and device for thermal treatment of substrates

MATTSON THERMAL PRODUCTS22 citations88

MATTSON TECH INC

1 patent

US7316969B2Jan 8, 2008

Method and apparatus for thermally treating substrates

MATTSON TECH INC2 citations60

MATTSON THERMAL PRODUCTS GMBH

1 patent

US7412299B2Aug 12, 2008

Process for determining the temperature of a semiconductor wafer in a rapid heating unit

MATTSON THERMAL PRODUCTS GMBH2 citations58

ZEISS CARL SMT GMBH

1 patent

US9482968B2Nov 1, 2016

Measuring system

ZEISS CARL SMT GMBH0 citations50