Inventor
Hu chuxiong
CN5 patents
⚠️ This page may combine multiple inventors who share the name “Hu chuxiong”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV TSINGHUA
3 patentsUS10532832B2Jan 14, 2020
Magnetic levitation reaction sphere
UNIV TSINGHUA2 citations71
US9869857B2Jan 16, 2018
Optical grating phase modulator for laser interference photoetching system
UNIV TSINGHUA0 citations51
US9995569B2Jun 12, 2018
Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
UNIV TSINGHUA0 citations38