Inventor
KOMATSU TOHRU
JP2 patents
Patents
2 patentsUS6309593B1Oct 30, 2001
Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device
TOSHIBA KK15 citations82
US6352628B2Mar 5, 2002
Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device
TOSHIBA KK8 citations72