Inventor
FUKASAWA YOSHIHARU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “FUKASAWA YOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
10 patentsUS4966676AOct 30, 1990
Sputtering target
TOSHIBA KK50 citations96
US5913100AJun 15, 1999
Mo-W material for formation of wiring, Mo-W target and method for production thereof, and Mo-W wiring thin film
TOSHIBA KK40 citations95
US7153589B1Dec 26, 2006
Mo-W material for formation of wiring, Mo-W target and method for production thereof, and Mo-W wiring thin film
TOSHIBA KK18 citations92
US6200694B1Mar 13, 2001
Mo-W material for formation of wiring, Mo-W target and method for production thereof, and Mo-W wiring thin film
TOSHIBA KK23 citations92
US5190630AMar 2, 1993
Sputtering target
TOSHIBA KK34 citations92
US4963240AOct 16, 1990
Sputtering alloy target and method of producing an alloy film
TOSHIBA KK38 citations92
US4842706AJun 27, 1989
Sputtering target
TOSHIBA KK41 citations92
US6309593B1Oct 30, 2001
Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device
TOSHIBA KK15 citations82
US5512155AApr 30, 1996
Film forming apparatus
TOSHIBA KK10 citations73
US6352628B2Mar 5, 2002
Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device
TOSHIBA KK8 citations72