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Inventor
AMANO SHUNJI
JP
3 patents
Patents
3 patents
US6801174B2
Oct 5, 2004
Display device, producing method of electronic apparatus and display device
SONY CORP
19 citations
91
US6447652B1
Sep 10, 2002
Thin-film forming method and thin-film forming apparatus
SONY CORP
11 citations
71
US6132516A
Oct 17, 2000
Vacuum deposition apparatus
SONY CORP
12 citations
69