Inventor
CHANG CHUNG-I
TW8 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHUNG-I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
3 patentsUS6472306B1Oct 29, 2002
Method of forming a dual damascene opening using CVD Low-K material and spin-on-polymer
IND TECH RES INST96 citations96
US6376392B1Apr 23, 2002
PECVD process for ULSI ARL
IND TECH RES INST12 citations72
US6251806B1Jun 26, 2001
Method to improve the roughness of metal deposition on low-k material
IND TECH RES INST13 citations72