Inventor
DUNCAN JAMES E
US8 patents
⚠️ This page may combine multiple inventors who share the name “DUNCAN JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS9809898B2Nov 7, 2017
Electroplating and post-electrofill systems with integrated process edge imaging and metrology systems
NOVELLUS SYSTEMS INC4 citations70
US10745817B2Aug 18, 2020
Configuration and method of operation of an electrodeposition system for improved process stability and performance
NOVELLUS SYSTEMS INC0 citations51
US9816196B2Nov 14, 2017
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte
NOVELLUS SYSTEMS INC1 citations48