Inventor
WAKAMIYA TED
US9 patents
Patents
9 patentsUS6318913B2Nov 20, 2001
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer
ADVANCED MICRO DEVICES INC16 citations91
US6170494B1Jan 9, 2001
Method for automatically cleaning resist nozzle
ADVANCED MICRO DEVICES INC28 citations91
US6336960B1Jan 8, 2002
System and method for purging air bubbles from filters
ADVANCED MICRO DEVICES INC23 citations89
US6648201B1Nov 18, 2003
Apparatus to reduce wasting of unused photoresist in semiconductor containers
ADVANCED MICRO DEVICES INC51 citations88
US6418946B1Jul 16, 2002
Apparatus for automatically cleaning resist nozzle
ADVANCED MICRO DEVICES INC12 citations72
US6250822B1Jun 26, 2001
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer
ADVANCED MICRO DEVICES INC9 citations72
US6481277B1Nov 19, 2002
Temperature control unit and sight glass
ADVANCED MICRO DEVICES INC7 citations70
US6368985B1Apr 9, 2002
Dual track/stepper interface configuration for wafer processing
ADVANCED MICRO DEVICES INC5 citations58
US6360959B1Mar 26, 2002
Dual resist dispense nozzle for wafer tracks
ADVANCED MICRO DEVICES INC0 citations48