Inventor
MARINARO VINCENT L
US9 patents
Patents
9 patentsUS6318913B2Nov 20, 2001
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer
ADVANCED MICRO DEVICES INC16 citations91
US6170494B1Jan 9, 2001
Method for automatically cleaning resist nozzle
ADVANCED MICRO DEVICES INC28 citations91
US6418946B1Jul 16, 2002
Apparatus for automatically cleaning resist nozzle
ADVANCED MICRO DEVICES INC12 citations72
US6250822B1Jun 26, 2001
Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developer
ADVANCED MICRO DEVICES INC9 citations72
US6481277B1Nov 19, 2002
Temperature control unit and sight glass
ADVANCED MICRO DEVICES INC7 citations70
US6361599B1Mar 26, 2002
Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash
ADVANCED MICRO DEVICES INC2 citations60
US6238747B1May 29, 2001
Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash
ADVANCED MICRO DEVICES INC4 citations60
US6082379AJul 4, 2000
Mechanism for cleaning an integrated circuit wafer hot plate while the hot plate is at operating temperature
ADVANCED MICRO DEVICES INC3 citations60
US6299688B1Oct 9, 2001
Developer nozzle clean combs
ADVANCED MICRO DEVICES INC0 citations49