Inventor
CHUANG CHENG-CHI
TW228 patents
⚠️ This page may combine multiple inventors who share the name “CHUANG CHENG-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
49 patentsUS11222892B2Jan 11, 2022
Backside power rail and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD16 citations94
US11158580B2Oct 26, 2021
Semiconductor devices with backside power distribution network and frontside through silicon via
TAIWAN SEMICONDUCTOR MFG CO LTD27 citations94
US9390965B2Jul 12, 2016
Air-gap forming techniques for interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations93
US11581224B2Feb 14, 2023
Method for forming long channel back-side power rail device
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations86
US11532713B2Dec 20, 2022
Source/drain contacts and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11450751B2Sep 20, 2022
Integrated circuit structure with backside via rail
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations86
US11443987B2Sep 13, 2022
Semiconductor devices with backside air gap dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11404548B2Aug 2, 2022
Capacitance reduction for backside power rail device
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US11374093B2Jun 28, 2022
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11355601B2Jun 7, 2022
Semiconductor devices with backside power rail and backside self-aligned via
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations86
US11349004B2May 31, 2022
Backside vias in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11342326B2May 24, 2022
Self-aligned etch in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11239325B2Feb 1, 2022
Semiconductor device having backside via and method of fabricating thereof
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11233005B1Jan 25, 2022
Method for manufacturing an anchor-shaped backside via
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US11121138B1Sep 14, 2021
Low resistance pickup cells for SRAM
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations86
US10937884B1Mar 2, 2021
Gate spacer with air gap for semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations86
US11257758B2Feb 22, 2022
Backside connection structures for nanostructures and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11088020B2Aug 10, 2021
Structure and formation method of interconnection structure of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10290580B2May 14, 2019
Hybrid copper structure for advance interconnect usage
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10276498B2Apr 30, 2019
Interconnect structure with air-gaps
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10109519B2Oct 23, 2018
Method of semiconductor integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9837354B2Dec 5, 2017
Hybrid copper structure for advance interconnect usage
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9716035B2Jul 25, 2017
Combination interconnect structure and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations84
US12369365B2Jul 22, 2025
Semiconductor devices with backside power rail and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations75
US11862561B2Jan 2, 2024
Semiconductor devices with backside routing and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations75
US11830769B2Nov 28, 2023
Semiconductor device with air gaps and method of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations75
US11682730B2Jun 20, 2023
Connector via structures for nanostructures and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations75
US11621197B2Apr 4, 2023
Semiconductor device with gate cut feature and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations75
US12148795B2Nov 19, 2024
Increasing device density and reducing cross-talk spacer structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12132092B2Oct 29, 2024
Backside vias in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12080713B2Sep 3, 2024
Self-aligned etch in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12021123B2Jun 25, 2024
Semiconductor devices with backside power rail and backside self-aligned via
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12009394B2Jun 11, 2024
Source/drain contacts and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11984350B2May 14, 2024
Integrated circuit structure with backside interconnection structure having air gap
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11955515B2Apr 9, 2024
Dual side contact structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11915972B2Feb 27, 2024
Methods of forming spacers for semiconductor devices including backside power rails
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11848372B2Dec 19, 2023
Method and structure for reducing source/drain contact resistance at wafer backside
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11842962B2Dec 12, 2023
Interconnect structure with air-gaps
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11842967B2Dec 12, 2023
Semiconductor devices with backside power distribution network and frontside through silicon via
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11810917B2Nov 7, 2023
Self-aligned etch in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11804486B2Oct 31, 2023
Backside power rail and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11777003B2Oct 3, 2023
Semiconductor structure with wraparound backside amorphous layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11721623B2Aug 8, 2023
Backside connection structures for nanostructures and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11670691B2Jun 6, 2023
Method for forming source/drain contacts utilizing an inhibitor
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11664280B2May 30, 2023
Semiconductor devices with backside air gap dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11658226B2May 23, 2023
Backside gate contact
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11658220B2May 23, 2023
Drain side recess for back-side power rail device
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11640941B2May 2, 2023
Semiconductor devices including metal gate protection and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11631638B2Apr 18, 2023
Semiconductor structure having an anchor-shaped backside via
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
CHUANG CHENG-CHI
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