Inventor
SCHEER STEVEN A
US7 patents
Patents
7 patentsUS7588879B2Sep 15, 2009
Graded spin-on organic antireflective coating for photolithography
IBM15 citations83
US7816069B2Oct 19, 2010
Graded spin-on organic antireflective coating for photolithography
IBM7 citations72
US7267863B2Sep 11, 2007
Film stack having under layer for preventing pinhole defects
IBM3 citations61
US7541065B2Jun 2, 2009
Method of forming film stack having under layer for preventing pinhole defects
IBM0 citations51
US7473461B2Jan 6, 2009
Film stack having under layer for preventing pinhole defects
IBM0 citations51
US7132316B2Nov 7, 2006
After deposition method of thinning film to reduce pinhole defects
IBM1 citations51
US7632631B2Dec 15, 2009
Method of preventing pinhole defects through co-polymerization
IBM0 citations39