Inventor

STROD ARIEH A

US3 patents

Patents

3 patents

US7269343B2Sep 11, 2007

Heating configuration for use in thermal processing chambers

MATTSON TECH INC37 citations94

US6970644B2Nov 29, 2005

Heating configuration for use in thermal processing chambers

MATTSON TECH INC52 citations94

US7949237B2May 24, 2011

Heating configuration for use in thermal processing chambers

MATTSON TECH INC17 citations90