Inventor
CHANG JIAN GUANG
CN3 patents
Patents
3 patentsUS8105899B2Jan 31, 2012
Method and structure for performing a chemical mechanical polishing process
JIANG LILY0 citations45
US8105898B2Jan 31, 2012
Method and structure for performing a chemical mechanical polishing process
JIANG LILY0 citations45
US8097508B2Jan 17, 2012
Method and structure for performing a chemical mechanical polishing process
JIANG LILY0 citations45