P

Inventor

PARK HEUNG-SOO

KR17 patents
⚠️ This page may combine multiple inventors who share the name “PARK HEUNG-SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

10 patents
US6570253B1May 27, 2003

Multi-layer film for a thin film structure and a capacitor using the same

SAMSUNG ELECTRONICS CO LTD30 citations92
US5789360AAug 4, 1998

Cleaning solution for use on a semiconductor wafer following chemical-mechanical polishing of the wafer and method for using same

SAMSUNG ELECTRONICS CO LTD41 citations92
US5672230ASep 30, 1997

Central management system of wet chemical stations

SAMSUNG ELECTRONICS CO LTD26 citations92
US6092539AJul 25, 2000

In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same

SAMSUNG ELECTRONICS CO LTD21 citations91
US6720275B2Apr 13, 2004

Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure

SAMSUNG ELECTRONICS CO LTD6 citations74
US6555394B2Apr 29, 2003

Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure

SAMSUNG ELECTRONICS CO LTD8 citations74
US6277204B1Aug 21, 2001

Methods for cleaning wafers used in integrated circuit devices

SAMSUNG ELECTRONICS CO LTD14 citations72
US6043206AMar 28, 2000

Solutions for cleaning integrated circuit substrates

SAMSUNG ELECTRONICS CO LTD13 citations72
US7052918B2May 30, 2006

Multi-layer film for thin film structure, capacitor using the same and fabrication method thereof

SAMSUNG ELECTRONICS CO LTD2 citations63
US6635582B2Oct 21, 2003

Method of manufacturing semiconductor device

SAMSUNG ELECTRONICS CO LTD6 citations62

SAMSUNG ELECTRO MECH

6 patents

PARK JOO-HYOUNG

1 patent