Inventor

TAKAHASI KAZUE

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TAKAHASI KAZUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US6583979B1Jun 24, 2003

Electrostatically attracting electrode and a method of manufacture thereof

HITACHI LTD25 citations91

US6370007B2Apr 9, 2002

Electrostatic chuck

HITACHI LTD17 citations83

HITACHI HIGH TECH CORP

1 patent

US7913646B2Mar 29, 2011

Vacuum processing apparatus and vacuum processing method

HITACHI HIGH TECH CORP1 citations46

KITAOKA KEN

1 patent

US8262801B2Sep 11, 2012

Vacuum processing method

KITAOKA KEN1 citations39