Inventor
ITOU YOUICHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ITOU YOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
9 patentsUS6373681B2Apr 16, 2002
Electrostatic chuck, and method of and apparatus for processing sample using the chuck
HITACHI LTD67 citations96
US6243251B1Jun 5, 2001
Electrostatic chuck, and method of and apparatus for processing sample using the chuck
HITACHI LTD50 citations96
US5946184AAug 31, 1999
Electrostatic chuck, and method of and apparatus for processing sample
HITACHI LTD87 citations96
US6235146B1May 22, 2001
Vacuum treatment system and its stage
HITACHI LTD22 citations92
US5781400AJul 14, 1998
Electrostatically attracting electrode and a method of manufacture thereof
HITACHI LTD34 citations92
US6583979B1Jun 24, 2003
Electrostatically attracting electrode and a method of manufacture thereof
HITACHI LTD25 citations91
US6370007B2Apr 9, 2002
Electrostatic chuck
HITACHI LTD17 citations83
US4459143AJul 10, 1984
Temperature control method for reversing type heat exchanger group of air separation system
HITACHI LTD5 citations61
US6720721B2Apr 13, 2004
Color cathode ray tube having an improved shadow mask supporting structure
HITACHI LTD0 citations41