Inventor

OONUKI HISAO

JP3 patents

Patents

3 patents

US5750987AMay 12, 1998

Ion beam processing apparatus

HITACHI LTD21 citations89

US6251218B1Jun 26, 2001

Ion beam processing apparatus

HITACHI LTD8 citations71

US5247181ASep 21, 1993

Ion beam processing apparatus and specimen replacing method for the same

HITACHI LTD9 citations70