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Inventor
KAMIYAMA YOSHIHIDE
JP
2 patents
Patents
2 patents
US6762496B2
Jul 13, 2004
Substrate and production method therefor
TOKUYAMA CORP
34 citations
87
US6733822B2
May 11, 2004
Process for producing sintered aluminum nitride furnished with via hole
TOKUYAMA CORP
3 citations
57