Inventor
LARSEN GRANT KENJI
US10 patents
⚠️ This page may combine multiple inventors who share the name “LARSEN GRANT KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
7 patentsUS6748293B1Jun 8, 2004
Methods and apparatus for high speed object handling
VARIAN SEMICONDUCTOR EQUIPMENT67 citations94
US5969934AOct 19, 1999
Electrostatic wafer clamp having low particulate contamination of wafers
VARIAN SEMICONDUCTOR EQUIPMENT57 citations94
US6839217B1Jan 4, 2005
Surface structure and method of making, and electrostatic wafer clamp incorporating surface structure
VARIAN SEMICONDUCTOR EQUIPMENT34 citations91
US6690022B2Feb 10, 2004
Ion beam incidence angle and beam divergence monitor
VARIAN SEMICONDUCTOR EQUIPMENT29 citations89
US6538873B1Mar 25, 2003
Active electrostatic seal and electrostatic vacuum pump
VARIAN SEMICONDUCTOR EQUIPMENT13 citations82
US6362946B1Mar 26, 2002
Electrostatic wafer clamp having electrostatic seal for retaining gas
VARIAN SEMICONDUCTOR EQUIPMENT18 citations82
US6911660B2Jun 28, 2005
Method of measuring ion beam angles
VARIAN SEMICONDUCTOR EQUIPMENT8 citations72