P

Inventor

SCHEINER DAVID

IL31 patents
⚠️ This page may combine multiple inventors who share the name “SCHEINER DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVA MEASURING INSTR LTD

19 patents
US6974962B2Dec 13, 2005

Lateral shift measurement using an optical technique

NOVA MEASURING INSTR LTD120 citations99
US6100985AAug 8, 2000

Method and apparatus for measurements of patterned structures

NOVA MEASURING INSTR LTD107 citations98
US6476920B1Nov 5, 2002

Method and apparatus for measurements of patterned structures

NOVA MEASURING INSTR LTD153 citations97
US6556947B1Apr 29, 2003

Optical measurements of patterned structures

NOVA MEASURING INSTR LTD79 citations96
US6281974B1Aug 28, 2001

Method and apparatus for measurements of patterned structures

NOVA MEASURING INSTR LTD55 citations96
US6292265B1Sep 18, 2001

Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects

NOVA MEASURING INSTR LTD56 citations95
US9140539B2Sep 22, 2015

Optical system and method for measurement of one or more parameters of via-holes

NOVA MEASURING INSTR LTD19 citations92
US7292341B2Nov 6, 2007

Optical system operating with variable angle of incidence

NOVA MEASURING INSTR LTD33 citations92
US6940609B2Sep 6, 2005

Method and system for measuring the topography of a sample

NOVA MEASURING INSTR LTD25 citations92
US6815947B2Nov 9, 2004

Method and system for thickness measurements of thin conductive layers

NOVA MEASURING INSTR LTD42 citations86
US6801315B2Oct 5, 2004

Method and system for overlay measurement

NOVA MEASURING INSTR LTD13 citations84
US7187456B2Mar 6, 2007

Method and apparatus for measurements of patterned structures

NOVA MEASURING INSTR LTD11 citations83
US6801326B2Oct 5, 2004

Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects

NOVA MEASURING INSTR LTD13 citations83
US7123366B2Oct 17, 2006

Method and apparatus for measurements of patterned structures

NOVA MEASURING INSTR LTD7 citations73
US6836324B2Dec 28, 2004

Method and apparatus for measurements of patterned structures

NOVA MEASURING INSTR LTD8 citations73
US7253970B2Aug 7, 2007

Reflective optical system

NOVA MEASURING INSTR LTD8 citations69
US9785059B2Oct 10, 2017

Lateral shift measurement using an optical technique

NOVA MEASURING INSTR LTD1 citations63
US6885446B2Apr 26, 2005

Method and system for monitoring a process of material removal from the surface of a patterned structure

NOVA MEASURING INSTR LTD6 citations61
US7532414B2May 12, 2009

Reflective optical system

NOVA MEASURING INSTR LTD4 citations58

VIEWNETIC LTD

5 patents

MAGNUS METAL LTD

3 patents

SCHEINER DAVID

1 patent

KADISON LAB INC

1 patent

YEDA RES & DEV

1 patent

NEWCO2FUELS LTD

1 patent