Inventor
MACHAVARIANI VLADIMIR
IL15 patents
⚠️ This page may combine multiple inventors who share the name “MACHAVARIANI VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVA MEASURING INSTR LTD
10 patentsUS6476920B1Nov 5, 2002
Method and apparatus for measurements of patterned structures
NOVA MEASURING INSTR LTD153 citations97
US7187456B2Mar 6, 2007
Method and apparatus for measurements of patterned structures
NOVA MEASURING INSTR LTD11 citations83
US7123366B2Oct 17, 2006
Method and apparatus for measurements of patterned structures
NOVA MEASURING INSTR LTD7 citations73
US6836324B2Dec 28, 2004
Method and apparatus for measurements of patterned structures
NOVA MEASURING INSTR LTD8 citations73
US10564106B2Feb 18, 2020
Raman spectroscopy based measurements in patterned structures
NOVA MEASURING INSTR LTD2 citations72
US6654108B2Nov 25, 2003
Test structure for metal CMP process control
NOVA MEASURING INSTR LTD12 citations71
US6885446B2Apr 26, 2005
Method and system for monitoring a process of material removal from the surface of a patterned structure
NOVA MEASURING INSTR LTD6 citations61
US10274435B2Apr 30, 2019
Method and system for optical metrology in patterned structures
NOVA MEASURING INSTR LTD1 citations59
US10916404B2Feb 9, 2021
TEM-based metrology method and system
NOVA MEASURING INSTR LTD0 citations58
US10761036B2Sep 1, 2020
Method and system for optical metrology in patterned structures
NOVA MEASURING INSTR LTD0 citations49
NOVA LTD
5 patentsUS12066385B2Aug 20, 2024
Raman spectroscopy based measurements in patterned structures
NOVA LTD1 citations72
US11275027B2Mar 15, 2022
Raman spectroscopy based measurements in patterned structures
NOVA LTD0 citations62
US11710616B2Jul 25, 2023
TEM-based metrology method and system
NOVA LTD0 citations58
US11450541B2Sep 20, 2022
Metrology method and system
NOVA LTD1 citations58
US11309162B2Apr 19, 2022
TEM-based metrology method and system
NOVA LTD0 citations58