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Inventor
OH DUCK-MAHN
KR
2 patents
Patents
2 patents
US10989520B2
Apr 27, 2021
Methods for nondestructive measurements of thickness of underlying layers
SAMSUNG ELECTRONICS CO LTD
0 citations
45
US10585115B2
Mar 10, 2020
Scanning probe inspector
SAMSUNG ELECTRONICS CO LTD
0 citations
37