Inventor
IKEDA KAZUMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA KAZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SEIMITSU CO LTD
4 patentsUS6267648B1Jul 31, 2001
Apparatus and method for chamfering wafer
TOKYO SEIMITSU CO LTD152 citations96
US6431961B1Aug 13, 2002
Apparatus and method for chamfering wafer
TOKYO SEIMITSU CO LTD16 citations90
US6062953AMay 16, 2000
Wafer positioning method and apparatus
TOKYO SEIMITSU CO LTD16 citations79
US6066031AMay 23, 2000
Wafer chamfering method and apparatus
TOKYO SEIMITSU CO LTD15 citations69