Inventor

PASADYN ALEXANDER J

US60 patents

⚠️ This page may combine multiple inventors who share the name “PASADYN ALEXANDER J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PASADYN ALEXANDER J

ADVANCED MICRO DEVICES INC

Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same

Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters

Kalman filter state estimation for a manufacturing system

Dynamic process state adjustment of a processing tool to reduce non-uniformity

Method and apparatus for utilizing integrated metrology data as feed-forward data

Method and apparatus for determining output characteristics using tool state data

Method and apparatus for dynamic sampling of a production line

Identifying a cause of a fault based on a process controller output

Method and apparatus for wafer-to-wafer control with partial measurement data

Dispatch and/or disposition of material based upon an expected parameter result

Method and apparatus for determining a sampling plan based on process and equipment state information

Method and apparatus for cascade control using integrated metrology

Method and apparatus for determining control actions incorporating defectivity effects

Method and apparatus for implementing dynamic qualification recipes

Method and apparatus for using a dynamic control model to compensate for a process interrupt

Method and apparatus for modeling of batch dynamics based upon integrated metrology

Method and apparatus for determining a sampling plan based on defectivity

Method and apparatus for optimizing downstream uniformity

Method and apparatus for determining a sampling plan based on process and equipment fingerprinting

Method and apparatus for combining integrated and offline metrology for process control

Method and apparatus for correlating error model with defect data

Method of using damaged areas of a wafer for process qualifications and experiments, and system for accomplishing same

Method and apparatus for controlling a plating process

Method and apparatus for initializing tool controllers based on tool event data

Method and apparatus for implementing competing control models

Matching data related to multiple metrology tools

Method and apparatus for dynamically monitoring controller tuning parameters

Method and apparatus for modifying design constraints based on observed performance

Method and apparatus for adaptively scheduling tool maintenance

Method for prioritizing production lots based on grade estimates and output requirements

Method and apparatus for controlling a tool using a baseline control script

Method of modeling and controlling the endpoint of chemical mechanical polishing operations performed on a process layer, and system for accomplishing same

Method and apparatus for controlling process target values based on manufacturing metrics

Method and apparatus for integrating multiple process controllers

Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information

Use of endpoint system to match individual processing stations within a tool

Process control based on an estimated process result

Method and apparatus for controlling the flow of wafers through a process flow

Method and apparatus for updating control state variables of a process control model based on rework data

Method and apparatus for distinguishing between sources of process variation

Tuning of a process control based upon layer dependencies

Method and apparatus using integrated metrology data for pre-process and post-process control

Dynamic targeting for a process control system

Automated method of controlling critical dimensions of features by controlling stepper exposure dose, and system for accomplishing same

Method of varying stepper exposure dose to compensate for across-wafer variations in photoresist thickness

(unassigned)

Method and apparatus for post-polish thickness and uniformity control

ADVANCES MICRO DEVICES INC

Method and apparatus for scheduling based on state estimation uncertainties

GLOBALFOUNDRIES INC

Dynamic adaptive sampling rate for model prediction

ADVANCED MIRCO DEVICES INC

Determining a next tool state based on fault detection information

SONDERMAN THOMAS J

Process control using analysis of an upstream process