Inventor

MONNIG KENNETH A

US3 patents

⚠️ This page may combine multiple inventors who share the name “MONNIG KENNETH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GENUS INC

2 patents

US4565157AJan 21, 1986

Method and apparatus for deposition of tungsten silicides

GENUS INC110 citations94

US4920908AMay 1, 1990

Method and apparatus for deposition of tungsten silicides

GENUS INC13 citations72

HEWLETT PACKARD CO

1 patent

US4696833ASep 29, 1987

Method for applying a uniform coating to integrated circuit wafers by means of chemical deposition

HEWLETT PACKARD CO24 citations79