Inventor
AKASHI TOMOYUKI
JP3 patents
Patents
3 patentsUS6861614B1Mar 1, 2005
S system for the formation of a silicon thin film and a semiconductor-insulating film interface
NEC CORP156 citations97
US7312418B2Dec 25, 2007
Semiconductor thin film forming system
NEC CORP32 citations91
US6680460B1Jan 20, 2004
Apparatus for producing a semiconductor thin film
NEC CORP22 citations90