Inventor
IRIE NOBUYUKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “IRIE NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
10 patentsUS6118516ASep 12, 2000
Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns
NIKON CORP134 citations98
US6842225B1Jan 11, 2005
Exposure apparatus, microdevice, photomask, method of exposure, and method of production of device
NIKON CORP70 citations97
US6337162B1Jan 8, 2002
Method of exposure, photomask, method of production of photomask, microdevice, and method of production of microdevice
NIKON CORP91 citations97
US5808910ASep 15, 1998
Alignment method
NIKON CORP78 citations96
US7001674B2Feb 21, 2006
Exposure method, exposure apparatus, and method of production of device
NIKON CORP24 citations92
US6710847B1Mar 23, 2004
Exposure method and exposure apparatus
NIKON CORP44 citations92
US6607863B2Aug 19, 2003
Exposure method of production of density filter
NIKON CORP22 citations92
US5596204AJan 21, 1997
Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system
NIKON CORP47 citations92
US6606145B2Aug 12, 2003
Exposure apparatus, microdevice, photomask, and exposure method
NIKON CORP18 citations81
US7034922B2Apr 25, 2006
Exposure apparatus and exposure method
NIKON CORP3 citations62