P

Inventor

D'URZO LUCIA

BE4 patents
⚠️ This page may combine multiple inventors who share the name “D'URZO LUCIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT NV

3 patents
US10056249B2Aug 21, 2018

Atomic layer deposition of antimony oxide films

ASM INT NV4 citations82
US9514934B2Dec 6, 2016

Atomic layer deposition of antimony oxide films

ASM INT NV1 citations61
US10699899B2Jun 30, 2020

Atomic layer deposition of antimony oxide films

ASM INT NV0 citations50

ASM INT

1 patent
US9006112B2Apr 14, 2015

Atomic layer deposition of antimony oxide films

ASM INT2 citations61