Inventor
DIETZ JAMES A
US8 patents
Patents
8 patentsUS6561213B2May 13, 2003
Fluid distribution system and process, and semiconductor fabrication facility utilizing same
ADVANCED TECH MATERIALS93 citations96
US7063097B2Jun 20, 2006
In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
ADVANCED TECH MATERIALS39 citations95
US6360546B1Mar 26, 2002
Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
ADVANCED TECH MATERIALS69 citations95
US6453924B1Sep 24, 2002
Fluid distribution system and process, and semiconductor fabrication facility utilizing same
ADVANCED TECH MATERIALS72 citations94
US7955797B2Jun 7, 2011
Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
ADVANCED TECH MATERIALS22 citations92
US7325560B2Feb 5, 2008
In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
ADVANCED TECH MATERIALS11 citations92
US7051749B2May 30, 2006
Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications
ADVANCED TECH MATERIALS19 citations92
US6474076B2Nov 5, 2002
Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
ADVANCED TECH MATERIALS25 citations92