Inventor
KALIAPPAN MUTHUKUMAR
US8 patents
Patents
8 patentsUS11658025B2May 23, 2023
Chalcogen precursors for deposition of silicon nitride
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US12281382B2Apr 22, 2025
Methods for depositing blocking layers on conductive surfaces
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US11702733B2Jul 18, 2023
Methods for depositing blocking layers on conductive surfaces
APPLIED MATERIALS INC0 citations60
US12568803B2Mar 3, 2026
Methods of forming interconnect structures
APPLIED MATERIALS INC0 citations58
US12550643B2Feb 10, 2026
Oxidants and strained-ring precursors
APPLIED MATERIALS INC0 citations58
US11821070B2Nov 21, 2023
Ruthenium film deposition using low valent metal precursors
APPLIED MATERIALS INC0 citations58
US12142477B2Nov 12, 2024
Chalcogen precursors for deposition of silicon nitride
APPLIED MATERIALS INC0 citations57
US12141688B2Nov 12, 2024
Crested barrier device and synaptic element
APPLIED MATERIALS INC0 citations54