Inventor
FU CHI-HUA
TW4 patents
⚠️ This page may combine multiple inventors who share the name “FU CHI-HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS11774844B2Oct 3, 2023
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11275301B2Mar 15, 2022
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12181791B2Dec 31, 2024
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60