Inventor
CHENG KUOTANG
TW3 patents
Patents
3 patentsUS11774844B2Oct 3, 2023
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11275301B2Mar 15, 2022
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12181791B2Dec 31, 2024
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60