Inventor

FANG WEN-LIANG

TW2 patents

Patents

2 patents

US6177874B1Jan 23, 2001

Liquid supplying device for providing chemical solution with a liquid level sensor

UNITED MICROELECTRONICS CORP7 citations69

US6070601AJun 6, 2000

Jet-cleaning device for developing station

UNITED MICROELECTRONICS CORP6 citations54