P

Inventor

KRIVULINA LILIYA

US5 patents
⚠️ This page may combine multiple inventors who share the name “KRIVULINA LILIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US11031262B2Jun 8, 2021

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019

Loadlock integrated bevel etcher system

APPLIED MATERIALS INC1 citations71

YANG YAO-HUNG

1 patent
US8309421B2Nov 13, 2012

Dual-bulb lamphead control methodology

YANG YAO-HUNG5 citations60

HENDRICKSON SCOTT A

1 patent
US8841629B2Sep 23, 2014

Microwave excursion detection for semiconductor processing

HENDRICKSON SCOTT A3 citations55