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Inventor
SCHLIEF RALPH
US
3 patents
⚠️ This page may combine multiple inventors who share the name “SCHLIEF RALPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
2 patents
US7175940B2
Feb 13, 2007
Method of two dimensional feature model calibration and optimization
ASML MASKTOOLS BV
365 citations
98
US7820341B2
Oct 26, 2010
Method of two dimensional feature model calibration and optimization
ASML MASKTOOLS BV
12 citations
83
GLOBALFOUNDRIES INC
1 patent
US9397012B2
Jul 19, 2016
Test pattern for feature cross-sectioning
GLOBALFOUNDRIES INC
1 citations
48