Inventor

UGAJIN HAJIME

JP5 patents

⚠️ This page may combine multiple inventors who share the name “UGAJIN HAJIME”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UGAJIN HAJIME

2 patents

US8440568B2May 14, 2013

Substrate etching method and system

UGAJIN HAJIME8 citations76

US8956546B2Feb 17, 2015

Substrate processing method and substrate processing apparatus

UGAJIN HAJIME0 citations46

SONY CORP

1 patent

US7252778B2Aug 7, 2007

Etching method and etching device

SONY CORP10 citations82

DAINIPPON SCREEN MFG

1 patent

US7979942B2Jul 19, 2011

Substrate treatment apparatus and substrate treatment method

DAINIPPON SCREEN MFG5 citations61

ODAGIRI MASAYA

1 patent

US8968475B2Mar 3, 2015

Substrate processing apparatus

ODAGIRI MASAYA2 citations58