Inventor

HANATANI MASARU

JP2 patents

Patents

2 patents

US4829374AMay 9, 1989

Surface inspection apparatus

KANZAKI PAPER MFG CO LTD25 citations89

US4897537AJan 30, 1990

Automatic focus adjusting system of microscope employed in surface inspection apparatus

KANZAKI PAPER MFG CO LTD18 citations68