Inventor
DAVIS JR CLAUDE L
US9 patents
Patents
9 patentsUS6465272B1Oct 15, 2002
Extreme ultraviolet soft x-ray projection lithographic method and mask devices
CORNING INC65 citations95
US6931097B1Aug 16, 2005
Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements
CORNING INC18 citations92
US6576380B2Jun 10, 2003
Extreme ultraviolet soft x-ray projection lithographic method and mask devices
CORNING INC31 citations92
US6176588B1Jan 23, 2001
Low cost light weight mirror blank
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USRE41220EApr 13, 2010
Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements
CORNING INC8 citations83
US6542224B2Apr 1, 2003
Silica-based light-weight EUV lithography stages
CORNING INC17 citations79
US6776006B2Aug 17, 2004
Method to avoid striae in EUV lithography mirrors
CORNING INC15 citations77
US5627676AMay 6, 1997
Birefringent glass waveplate containing copper halide crystals
CORNING INC16 citations73
US5425046AJun 13, 1995
Optical collimating/polarizing device, method of making same and frequency stabilized laser using same
CORNING INC8 citations72