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Inventor
KANETSUKI NORIO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KANETSUKI NORIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHARP KK
1 patent
US6527908B2
Mar 4, 2003
Plasma process apparatus
SHARP KK
40 citations
91
TADAHIRO OHMI
1 patent
US6893970B2
May 17, 2005
Plasma processing method
TADAHIRO OHMI
0 citations
50