Inventor
SHI XUELONG
US20 patents
⚠️ This page may combine multiple inventors who share the name “SHI XUELONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
16 patentsUS6792591B2Sep 14, 2004
Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
ASML MASKTOOLS BV160 citations99
US7175940B2Feb 13, 2007
Method of two dimensional feature model calibration and optimization
ASML MASKTOOLS BV365 citations98
US6519760B2Feb 11, 2003
Method and apparatus for minimizing optical proximity effects
ASML MASKTOOLS BV61 citations96
US7594199B2Sep 22, 2009
Method of optical proximity correction design for contact hole mask
ASML MASKTOOLS BV22 citations92
US7550235B2Jun 23, 2009
Method and apparatus for performing model based placement of phase-balanced scattering bars for sub-wavelength optical lithography
ASML MASKTOOLS BV25 citations92
US7342646B2Mar 11, 2008
Method of manufacturing reliability checking and verification for lithography process using a calibrated eigen decomposition model
ASML MASKTOOLS BV27 citations92
US7242459B2Jul 10, 2007
Method of predicting and minimizing model OPC deviation due to mix/match of exposure tools using a calibrated Eigen decomposition model
ASML MASKTOOLS BV31 citations92
US7434195B2Oct 7, 2008
Method for performing full-chip manufacturing reliability checking and correction
ASML MASKTOOLS BV13 citations84
US7376930B2May 20, 2008
Method, program product and apparatus for generating assist features utilizing an image field map
ASML MASKTOOLS BV13 citations84
US7124395B2Oct 17, 2006
Automatic optical proximity correction (OPC) rule generation
ASML MASKTOOLS BV18 citations84
US7100145B2Aug 29, 2006
Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
ASML MASKTOOLS BV13 citations84
US7820341B2Oct 26, 2010
Method of two dimensional feature model calibration and optimization
ASML MASKTOOLS BV12 citations83
US7514183B2Apr 7, 2009
Method for performing transmission tuning of a mask pattern to improve process latitude
ASML MASKTOOLS BV16 citations83
US7440082B2Oct 21, 2008
Method of predicting and minimizing model OPC deviation due to mix/match of exposure tools using a calibrated eigen decomposition model
ASML MASKTOOLS BV8 citations74
US8040573B2Oct 18, 2011
Method, program product and apparatus for translating geometrical design rules into boundary conditions in the imaging space so as to define test patterns for use in optical model calibration
ASML MASKTOOLS BV5 citations63
US7735052B2Jun 8, 2010
Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
ASML MASKTOOLS BV4 citations63