Inventor
VAN BRUGGEN MARTIJN J
NL4 patents
Patents
4 patentsUS8134135B2Mar 13, 2012
Multiple beam charged particle optical system
KRUIT PIETER43 citations96
US8598545B2Dec 3, 2013
Multiple beam charged particle optical system
KRUIT PIETER4 citations72
US8188450B2May 29, 2012
Multiple beam charged particle optical system
KRUIT PIETER4 citations72
US8648318B2Feb 11, 2014
Multiple beam charged particle optical system
KRUIT PIETER2 citations61