Inventor

SUKA YUUKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SUKA YUUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HARADA YUJI

1 patent

US8420292B2Apr 16, 2013

Polymer, resist composition, and patterning process

HARADA YUJI6 citations71

KINSHO TAKESHI

1 patent

US8697903B2Apr 15, 2014

Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid

KINSHO TAKESHI3 citations60

SHINETSU CHEMICAL CO

1 patent

US9261783B2Feb 16, 2016

Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acid

SHINETSU CHEMICAL CO0 citations51

HASEGAWA KOJI

1 patent

US8795946B2Aug 5, 2014

Polymerizable ester compound, polymer, resist composition, and patterning process

HASEGAWA KOJI0 citations45

SUKA YUUKI

1 patent

US9086628B2Jul 21, 2015

Resist protective film-forming composition and patterning process

SUKA YUUKI1 citations44