Inventor

HIRNET ALEXANDER

DE4 patents

⚠️ This page may combine multiple inventors who share the name “HIRNET ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7460206B2Dec 2, 2008

Projection objective for immersion lithography

ZEISS CARL SMT AG71 citations95

US7489441B2Feb 10, 2009

Monocrystalline optical component with curved surface and multilayer coating

ZEISS CARL SMT AG277 citations94

PAZIDIS ALEXANDRA

1 patent

US8435726B2May 7, 2013

Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus

PAZIDIS ALEXANDRA0 citations48

VARTA MICROBATTERY GMBH

1 patent

US11095134B2Aug 17, 2021

Method of producing a modular battery storage system, modular battery storage system, and battery management system therefor

VARTA MICROBATTERY GMBH0 citations39