Inventor

ZIMMERMAN PAUL A

US10 patents

⚠️ This page may combine multiple inventors who share the name “ZIMMERMAN PAUL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEL CORP

3 patents

US9932671B2Apr 3, 2018

Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD)

INTEL CORP10 citations84

US9786559B2Oct 10, 2017

Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (TSVs)

INTEL CORP3 citations69

US10998405B2May 4, 2021

Low-defect graphene-based devices and interconnects

INTEL CORP0 citations62

ZIMMERMAN PAUL A

3 patents

US8124230B2Feb 28, 2012

SEMATECH INC

3 patents

US7732120B2Jun 8, 2010

Method for making soft pellicles

SEMATECH INC0 citations43

US7504192B2Mar 17, 2009

Soft pellicle for 157 and 193 nm and method of making same

SEMATECH INC0 citations43

US7709180B2May 4, 2010

Soft pellicle and method of making same

SEMATECH INC0 citations41

UNIV PITTSBURGH

1 patent

US5629210AMay 13, 1997

Rapid screening test for smith-lemli-opitz syndrome

UNIV PITTSBURGH30 citations86

ZIMMERMAN PAUL A

INTEL CORP

Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD)

Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (TSVs)

Low-defect graphene-based devices and interconnects

ZIMMERMAN PAUL A

Non-aggregating nanoparticles and the use thereof

Cleaning organic residues from EUV optics and masks

Immersion lithography using hafnium-based nanoparticles

SEMATECH INC

Method for making soft pellicles

Soft pellicle for 157 and 193 nm and method of making same

Soft pellicle and method of making same

UNIV PITTSBURGH

Rapid screening test for smith-lemli-opitz syndrome