Inventor
TANII KAZUMA
JP4 patents
Patents
4 patentsUS12106930B2Oct 1, 2024
Charged particle beam device
HITACHI HIGH TECH CORP1 citations60
US11276548B2Mar 15, 2022
Charged particle beam device and charged particle beam adjustment method
HITACHI HIGH TECH CORP0 citations58
US9368319B2Jun 14, 2016
Method for removing foreign substances in charged particle beam device, and charged particle beam device
HITACHI HIGH TECH CORP1 citations50
US7514683B2Apr 7, 2009
Scanning electron microscope
HITACHI HIGH TECH CORP1 citations50